Si impurity-induced layer disordering of Alx Ga1-x -GaAs quantum-well heterostructures by As-free open-tube rapid thermal annealing.

Autor: Major, J. S., Kish, F. A., Richard, T. A., Sugg, A. R., Baker, J. E., Holonyak, N.
Předmět:
Zdroj: Journal of Applied Physics; 12/15/1990, Vol. 68 Issue 12, p6199, 8p
Abstrakt: Describes silicon impurity-induced layer disordering and Al-Ga interdiffusion in Al[sub x]Ga[sub 1-x] As-GaAs quantum-well heterostructures using open-tube rapid thermal annealing in a flowing N[sub 2]/H[sub 2] ambient. Enhancement of Ga interdiffusion; Diffusion on point defects; Effects of dielectric encapsulation on Al-Ga interdiffusion.
Databáze: Complementary Index