| Autor: |
Tompkins, Harland G., Sellers, James A., Tracy, Clarence |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 4/15/1993, Vol. 73 Issue 8, p3932, 7p, 3 Black and White Photographs, 1 Diagram, 7 Graphs |
| Abstrakt: |
Describes the optical consideration of interest and one method of fabricating a superior anti-reflective coating (ARC) through the partial oxidation of a thin TiW capping layer. Importance of ARC on photolithography; Fabrication of the film; Wavelength used for thickness measurements of the film. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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