Effect of deposition parameters on rf sputtered CoZr and CoZrRe thin films for magnetic recording heads.

Autor: Guzman, J. I., Kryder, M. H.
Předmět:
Zdroj: Journal of Applied Physics; 4/15/1987, Vol. 61 Issue 8, p3240, 3p, 5 Graphs
Abstrakt: Focuses on a study which characterized the dependence of coercivity, anisotropy field and saturation magnetization on sputtering conditions and film compositions of cobalt zirconium and cobalt zirconium rhenium thin films. Experimental procedures; Impact of particle bombardment on temperature; Effect of argon pressure on film coercivity.
Databáze: Complementary Index