The use of graded InGaAs layers and patterned substrates to remove threading dislocations from GaAs on Si.

Autor: Knall, J., Romano, L. T., Biegelsen, D. K., Bringans, R. D., Chui, H. C., Harris, J. S., Treat, D. W., Bour, D. P.
Předmět:
Zdroj: Journal of Applied Physics; 9/1/1994, Vol. 76 Issue 5, p2697, 6p, 2 Black and White Photographs, 7 Diagrams
Abstrakt: Deals with a study which investigated threading dislocation removal from gallium arsenide films on silicon by introduction of additional indium gallium arsenide graded strain layers in combination with growth on patterned substrates. Experiment; Analysis of the dislocation structure using transmission electron microscopy; Results and discussion; Conclusion.
Databáze: Complementary Index