Characterization of the buried oxide in SOI structures by a rate window method.
| Autor: | Ioannou-Sougleridis, V., Papaioannou, G. J., Dimitrakis, P., Cristoloveanu, S. |
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| Zdroj: | Journal of Applied Physics; 9/1/1993, Vol. 74 Issue 5, p3298, 5p |
| Abstrakt: | Presents a study which developed a method for the characterization of the SOI separation by implanted oxygen oxide. Experimental details; Results; Conclusion. |
| Databáze: | Complementary Index |
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