Ion transport in an electron cyclotron resonance plasma.

Autor:	Sadeghi, Nader, Nakano, Toshiki, Trevor, Dennis J., Gottscho, Richard A.
Předmět:	ION exchange (Chemistry) ELECTRON cyclotron resonance sources CHEMICAL reactors ARGON HELIUM
Zdroj:	Journal of Applied Physics; 9/1/1991, Vol. 70 Issue 5, p2552, 18p
Abstrakt:	Presents information on a study which described detailed measurements of ion velocity distributions in both the source and reactor regions of an electron cyclotron resonance plasma reactor system using mixtures of argon and helium. Methods; Results; Discussion.
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu