Comparison of electron-density measurements made using a Langmuir probe and microwave interferometer in the Gaseous Electronics Conference reference reactor.

Autor:	Overzet, Lawrence J., Hopkins, Michael B.
Předmět:	ELECTRON distribution ARGON PLASMA frequencies GLOW discharges RADIO frequency
Zdroj:	Journal of Applied Physics; 10/1/1993, Vol. 74 Issue 7, p4323, 8p, 1 Diagram, 9 Graphs
Abstrakt:	Presents a study which combined a Langmuir probe and a microwave interferometer to measure the electron density of argon glow discharges in the Gaseous Electronics Conference referencer reactor. Macroscopic perturbation of the plasma electron density caused by the Langmuir probe; Impact of the probe's presence in a radio-frequency discharge; Comparison between Langmuir probe results and microwave probe results.
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu