| Autor: |
Frey, E. C., Yu, N., Patnaik, B., Parikh, N. R., Swanson, M. L., Chu, W. K. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 10/1/1993, Vol. 74 Issue 7, p4750, 6p, 2 Diagrams, 1 Chart, 3 Graphs |
| Abstrakt: |
Reports on the transition between germanium segregation and trapping during high-pressure oxidation of Ge[subx]Si[sub1-x]/Si. Analysis of the atomic fraction x of germanium; Effect of oxidation on the germanium distribution; Significance of the oxidation of Ge[subx]Si[sub1-x] alloys. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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