| Autor: |
Mintz, Moshe H., Jo, Yangsun, Rabalais, J. Wayne |
| Předmět: |
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| Zdroj: |
Journal of Chemical Physics; 2/1/1985, Vol. 82 Issue 3, p1275, 6p, 1 Chart, 3 Graphs |
| Abstrakt: |
A thermalization–reaction–capture model for low dose active ion bombardment which has been treated recently for the diffusionless case has been extended to include fast irradiation-enhanced diffusion in the near-surface region. Analytical expressions are derived for the reduced slopes of the AES or XPS intensities vs ion dose curves for a given ion primary energy and ion/target combination. Comparison of these theoretical reduced slopes with experimental plots yields a nondestructive means for estimating the concentration distributions of the reaction product in the target. In cases when these distributions obey the two extreme possibilities (i.e., the diffusionless case and the fast-diffusion case) the corresponding reaction probabilities may be obtained. Some experimental examples are discussed. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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