Sol-Gel PZT for MEMS Applications.
| Autor: | Piekarski, Brett, Dubey, Madan, Zakar, Eugene, Polcawich, Ronald, Devoe, Don, Wickenden, Dennis |
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| Zdroj: | Integrated Ferroelectrics; Jan2002, Vol. 42 Issue 1, p25-37, 13p |
| Databáze: | Complementary Index |
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