Evaluation of electrical properties and SIMS profiles on forming gas(N 2 -H 2 ) annealed Pt/PZT/Pt capacitors.
| Autor: | Ashida, Hiroshi, Tomotani, Miki, Tamura, Tetsuro, Matsuura, Katsuyoshi, Goto, Yasuyuki, Otani, Seigen |
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| Zdroj: | Integrated Ferroelectrics; Sep1998, Vol. 21 Issue 1-4, p97-105, 9p |
| Databáze: | Complementary Index |
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