Multiwafer MOCVD systems for ferroelectrics.
Autor: | Deschler, M., Woelk, E., Schmitz, D., Strauch, G., Jürgensen, H. |
---|---|
Zdroj: | Integrated Ferroelectrics; Sep1997, Vol. 18 Issue 1-4, p119-125, 7p |
Databáze: | Complementary Index |
Externí odkaz: |
Autor: | Deschler, M., Woelk, E., Schmitz, D., Strauch, G., Jürgensen, H. |
---|---|
Zdroj: | Integrated Ferroelectrics; Sep1997, Vol. 18 Issue 1-4, p119-125, 7p |
Databáze: | Complementary Index |
Externí odkaz: |