Multiwafer MOCVD systems for ferroelectrics.
| Autor: | Deschler, M., Woelk, E., Schmitz, D., Strauch, G., Jürgensen, H. |
|---|---|
| Zdroj: | Integrated Ferroelectrics; Sep1997, Vol. 18 Issue 1-4, p119-125, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Deschler, M., Woelk, E., Schmitz, D., Strauch, G., Jürgensen, H. |
|---|---|
| Zdroj: | Integrated Ferroelectrics; Sep1997, Vol. 18 Issue 1-4, p119-125, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|