Characteristics of Low- k Nanoporous Poly(methylsilsequioxane) Thin Films.
| Autor: | Min, Sung-Kyu, Park, Jae-Man, Song, Kitae, Jin, Moon Young, Lee, Changjin, Yoon, Do Yeung, Rhee, Hee-Woo |
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| Zdroj: | Molecular Crystals & Liquid Crystals; Jan2002, Vol. 377 Issue 1, p193-196, 4p |
| Databáze: | Complementary Index |
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