Electron irradiation of polymers and its application to resists for electron-beam lithography.
| Autor: | Bowden, Murrae J. |
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| Zdroj: | Critical Reviews in Solid State & Materials Science; Feb1979, Vol. 8 Issue 3, p223-264, 42p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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