Epitaxial growth of silicon assisted by ion implantation.
| Autor: | Itoh, Tadatsugu, Nakamura, Tohru |
|---|---|
| Zdroj: | Radiation Effects; May1971, Vol. 9 Issue 1/2, p1-4, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
| Autor: | Itoh, Tadatsugu, Nakamura, Tohru |
|---|---|
| Zdroj: | Radiation Effects; May1971, Vol. 9 Issue 1/2, p1-4, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|