Silicides, Polycide, and Salicide.
Autor: | Tung, Chih-Hang, Sheng, George T. T., Lu, Chih-Yuan |
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Zdroj: | ULSI Semiconductor Technology Atlas; 2003, p256-286, 31p |
Databáze: | Complementary Index |
Externí odkaz: |
Autor: | Tung, Chih-Hang, Sheng, George T. T., Lu, Chih-Yuan |
---|---|
Zdroj: | ULSI Semiconductor Technology Atlas; 2003, p256-286, 31p |
Databáze: | Complementary Index |
Externí odkaz: |