Effect of ion assisted deposition on optical scatter and surface microstructure of thin films.
| Autor: | Al-Jumaily, G. A., McNally, J. J., McNeil, J. R., Herrmann, W. C. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1985, Vol. 3 Issue 3, p651-655, 5p |
| Databáze: | Complementary Index |
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