Silicon cold cathodes as possible sources in electron lithography systems.
| Autor: | van Gorkom, G. G. P., Hoeberechts, A. M. E. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1987, Vol. 5 Issue 4, p1544-1548, 5p |
| Databáze: | Complementary Index |
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