Comparison of atomic force microscopy imaging methods and roughness determinations for a highly polished quartz surface.
| Autor: | Dokou, Eleni, Zhang, Lanping, Barteau, Mark A. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2002, Vol. 20 Issue 6, p2183-2186, 4p |
| Databáze: | Complementary Index |
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