Study on a condition for forming the high density of silicon needles with high aspect ratio.
| Autor: | Kanechika, Masakazu, Sugimoto, Noriaki, Mitsushima, Yasuichi |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2002, Vol. 20 Issue 5, p1843-1846, 4p |
| Databáze: | Complementary Index |
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