Wafer temperature measurements during dielectric etching in a MERIE etcher.
| Autor: | Gabriel, Calvin T. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2002, Vol. 20 Issue 4, p1542-1547, 6p |
| Databáze: | Complementary Index |
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