Evaluation of new x-ray stepper, the XRA.
| Autor: | Sumitani, Hiroaki, Suita, Muneyoshi, Mitsui, Soichiro, Aoyama, Hajime, Fujii, Kiyoshi, Watanabe, Hiroshi, Taguchi, Takao, Matsui, Yasuji |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2001, Vol. 19 Issue 6, p2448-2454, 7p |
| Databáze: | Complementary Index |
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