PREVAIL-EPL alpha tool: Early results.
| Autor: | Golladay, S. D., Pfeiffer, H. C., Bohnenkamp, C. A., Dhaliwal, R. S., Enichen, W. A., Gordon, M. S., Kendall, R. A., Lieberman, J. E., Stickel, W., Rockrohr, J. D., Tressler, E. V., Tanimoto, A., Yamaguchi, T., Okamoto, K., Suzuki, K., Miura, T., Okino, T., Kawata, S., Morita, K., Suzuki, S. C. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2001, Vol. 19 Issue 6, p2459-2467, 9p |
| Databáze: | Complementary Index |
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