Ion channeling effects on the focused ion beam milling of Cu.
| Autor: | Kempshall, B. W., Schwarz, S. M., Prenitzer, B. I., Giannuzzi, L. A., Irwin, R. B., Stevie, F. A. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2001, Vol. 19 Issue 3, p749-754, 6p |
| Databáze: | Complementary Index |
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