Thermal stability and adhesion improvement of Ag deposited on Pa-n by oxygen plasma treatment.
| Autor: | Gadre, Kaustubh S., Alford, T. L. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2000, Vol. 18 Issue 6, p2814-2819, 6p |
| Databáze: | Complementary Index |
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