Effects of smoothing on defect printability at extreme ultraviolet wavelengths.
| Autor: | Cardinale, G. F., Ray-Chaudhuri, A. K., Fisher, A., Mangat, P. S. J., Wasson, J., Mirkarimi, P. B., Gullikson, E. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2000, Vol. 18 Issue 6, p2944-2949, 6p |
| Databáze: | Complementary Index |
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