Scaled measurements of global space-charge induced image blur in electron beam projection system.
| Autor: | Han, Liqun, Pease, R. Fabian, Meisburger, W. Dan, Winograd, Gil I., Takahashi, Kimitoshi |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2000, Vol. 18 Issue 6, p2999-3003, 5p |
| Databáze: | Complementary Index |
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