Optimization of microcolumn electron optics for high-current applications.

Autor:	Mankos, M., Lee, K. Y., Muray, L., Spallas, J., Hsu, Y., Stebler, C., DeVore, W., Bullock, E., Chang, T. H. P.
Zdroj:	Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2000, Vol. 18 Issue 6, p3057-3060, 4p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu