Fabrication of diffractive optical elements for an integrated compact optical microelectromechanical system laser scanner.
| Autor: | Wendt, J. R., Krygowski, T. W., Vawter, G. A., Blum, O., Sweatt, W. C., Warren, M. E., Reyes, D. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2000, Vol. 18 Issue 6, p3608-3611, 4p |
| Databáze: | Complementary Index |
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