Field emission arrays by silicon micromachining.
| Autor: | Debski, T., Volland, B., Barth, W., Shi, F., Hudek, P., Rangelow, I. W., Grabiec, P., Studzinska, K., Zaborowski, M., Mitura, S. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2000, Vol. 18 Issue 2, p896-899, 4p |
| Databáze: | Complementary Index |
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