Frictional properties of titanium carbide, titanium nitride, and vanadium carbide: Measurement of a compositional dependence with atomic force microscopy.
| Autor: | Lee, Seunghwan, El-bjeirami, Oussama, Perry, Scott S., Didziulis, Stephen V., Frantz, Peter, Radhakrishnan, Gouri |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2000, Vol. 18 Issue 1, p69-75, 7p |
| Databáze: | Complementary Index |
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