Accuracy of secondary ion mass spectrometry in determining ion implanted B doses as confirmed by nuclear reaction analysis.
| Autor: | Magee, Charles W., Jacobson, Dale, Gossmann, Hans-J. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2000, Vol. 18 Issue 1, p489-492, 4p |
| Databáze: | Complementary Index |
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