Nanofabrication with deep-ultraviolet lithography and resolution enhancements.
| Autor: | Fritze, M., Palmateer, S., Maki, P., Knecht, J., Chen, C. K., Astolfi, D., Cann, S., Denault, S., Krohn, K., Wyatt, P.W. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1999, Vol. 17 Issue 6, p3310-3313, 4p |
| Databáze: | Complementary Index |
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