Generalization of electrostatic lens characteristics using the Picht ray trajectories.
| Autor: | Kawanami, Yoshimi, Ishitani, Tohru |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1999, Vol. 17 Issue 4, p1400-1405, 6p |
| Databáze: | Complementary Index |
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