Multiwafer gas source molecular beam epitaxial system for production technology.
| Autor: | Izumi, Shigekazu, Kouji, Yoshiharu, Hayafuji, Norio |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1999, Vol. 17 Issue 3, p1011-1016, 6p |
| Databáze: | Complementary Index |
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