Aspheric collimator for a point source x-ray lithography system.
| Autor: | Singh-Gasson, S., Vladimirsky, Y., Cerrina, F. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1998, Vol. 16 Issue 6, p3456-3461, 6p |
| Databáze: | Complementary Index |
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