Improving pattern placement using through-the-membrane signal monitoring.
| Autor: | Perkins, F. K., Marrian, C. R. K., Peckerar, M. C. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1998, Vol. 16 Issue 6, p3567-3571, 5p |
| Databáze: | Complementary Index |
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