Oxidation properties of silicon dots on silicon oxide investigated using energy filtering transmission electron microscopy.
| Autor: | Single, C., Zhou, F., Heidemeyer, H., Prins, F. E., Kern, D. P., Plies, E. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1998, Vol. 16 Issue 6, p3938-3942, 5p |
| Databáze: | Complementary Index |
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