A review of ion projection lithography.
| Autor: | Melngailis, J., Mondelli, A. A., Berry, Ivan L., Mohondro, R. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1998, Vol. 16 Issue 3, p927-957, 31p |
| Databáze: | Complementary Index |
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