Characterization of two by two electron-beam microcolumn array aligned with field emission array.

Autor:	Park, Jeong-Young, Lera, Jared D., Choi, H. J., Buh, G. H., Kang, C. J., Jung, J. H., Choi, S. S., Jeon, D., Kuk, Young
Zdroj:	Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1998, Vol. 16 Issue 2, p826-828, 3p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu