Generic scanned-probe microscope sensors by combined micromachining and electron-beam lithography.
| Autor: | Zhou, H., Midha, A., Mills, G., Thoms, S., Murad, S. K., Weaver, J. M. R. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1998, Vol. 16 Issue 1, p54-58, 5p |
| Databáze: | Complementary Index |
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