Air-bridges, air-ramps, planarization, and encapsulation using pyrolytic photoresist in the fabrication of three-dimensional microstructures.
| Autor: | Porkolab, G. A., Chen, Y. J., Tabatabaei, Seyed Ahmad, Agarwala, Sambhu, Johnson, F. G., King, Oliver, Dagenais, M., Frizzell, Russell E., Beard, W. T., Stone, D. R. |
|---|---|
| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1997, Vol. 15 Issue 6, p1961-1965, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|