Application of transmission electron detection to SCALPEL mask metrology.
| Autor: | Farrow, R. C., Postek, M. T., Keery, W. J., Jones, S. N., Lowney, J. R., Blakey, M., Fetter, L. A., Griffith, J. E., Liddle, J. A., Hopkins, L. C., Huggins, H. A., Peabody, M., Novembre, A. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1997, Vol. 15 Issue 6, p2167-2172, 6p |
| Databáze: | Complementary Index |
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