X-ray micro- and nanofabrication using a laser-plasma source at 1 nm wavelength.
| Autor: | Turcu, I. C. E., Allot, R. M., Mann, C. M., Reeves, C., Ross, I. N., Lisi, N., Maddison, B. J., Moon, S. W., Prewett, P., Stevenson, J. T. M., Ross, A. W. S., Gundlach, A. M., Koek, B., Mitchell, P., Anastasi, P., McCoard, C., Kim, N. S. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1997, Vol. 15 Issue 6, p2495-2502, 8p |
| Databáze: | Complementary Index |
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