Nanolithography by displacement of catalytic metal clusters using an atomic force microscope tip.
| Autor: | Brandow, S. L., Dressick, W. J., Dulcey, C. S., Koloski, T. S., Shirey, L. M., Schmidt, J., Calvert, J. M. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1997, Vol. 15 Issue 5, p1818-1824, 7p |
| Databáze: | Complementary Index |
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