Testing of a rapid fault detection model for quality control: Borophosphosilicate glass thin films monitored by infrared absorption spectroscopy.
| Autor: | Zhang, S., Franke, J. E., Niemczyk, T. M., Haaland, D. M., Cox, J. N., Banerjee, I. |
|---|---|
| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1997, Vol. 15 Issue 4, p955-960, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|