I-V characteristics of modified silicon surface using scanning probe microscopy.
Autor: | Yasue, Takao, Koyama, Hiroshi, Kato, Tadao, Nishioka, Tadashi |
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Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1997, Vol. 15 Issue 3, p614-617, 4p |
Databáze: | Complementary Index |
Externí odkaz: |