Use of multiple analytical techniques to confirm improved optical modeling of SnO2:F films by atomic force microscopy and spectroscopic ellipsometry.
| Autor: | Ruzakowski Athey, P., Urban, F. K., Holloway, P. H. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1996, Vol. 14 Issue 6, p3436-3444, 9p |
| Databáze: | Complementary Index |
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