General aspheric refractive micro-optics fabricated by optical lithography using a high energy beam sensitive glass gray-level mask.
| Autor: | Däschner, Walter, Long, Pin, Stein, Robert, Wu, Chuck, Lee, S. H. |
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| Zdroj: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1996, Vol. 14 Issue 6, p3730-3733, 4p |
| Databáze: | Complementary Index |
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